ECE Testing Facility

NanoMap-500LS Contact Surface Profilometer

Description

The AEP Technology NanoMap-500LS is an advanced stylus contact surface profiler. This contact profilometer is able to generate high resolution 2D and 3D images. The system can acquire surface profiles by scanning the stage, like other conventional contact surface profilers, or by scanning the stylus over the surface with the stage stationary. This scanning tip surface profiler mode yields higher resolution and greater flexibility.

The NanoMap-500LS generates 2D and 3D images up to 150mm x 150mm scanning area. Our contact profilometer has superior repeatability and uses ultra low force that allows it to measure surface topography for any type of material. The system is ideal for surface metrology in both research and production environments. The system has a full data analysis system powered by SPIP. The contact surface profiler software is intuitive, user friendly and has extensive libraries for surface analysis of various applications.

Features
Contact surface profiling by tip or stage scanning
Generates both 2D and 3D images
Z range from nm to 1mm
XY scanning range up to 150mm x 150mm
Simple operation with user friendly software interface
Integrated color optical camera for direct sample viewing during scanning

Applications
Step height measurements
Surface roughness measurements
Quantify scratch and dig features, wear depth, width and volume
Surface flatness or curvature measurements
2D thin film stress measurements
Surface profiling

Additional details can be found at the AEP website

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