ECE Testing Facility
MPI TS-150 Probe Station
Description
MPI Probe Station
Is an open, easy to use and cost effective manual probe system designed for precision analysis of substrates and wafers up to 150, 200 and 300mm. This system addresses a wide variety of applications such as Failure Analysis, Design Validation/IC Engineering, Wafer Level Reliability, MEMS, High Power and Device Characterization and Modeling.
Features and Benefits
The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25×25 mm XY-Theta micrometer movement.
Measurement accuracy depends on the contact quality first! The highly repeatable (1µm) platen lift design with three discrete positions for contact, separation (300µm), and loading (3mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI manual probe systems. These features prevent unexpected probe or wafer damage while providing intuitive control and accurate contact positioning. This capability is especially critical in both high frequency and high power applications in order to achieve the most accurate measurement results.
The probe platen has 25 mm of fine height adjustment required to support various applications. The unique 1mm accurate scale gives direct feedback about the current position.
All manual systems includes vibration absorbing base to achieve stable and reliable long-term probe to pad contact which ensures reliable measurement results. Vibration isolation platform or table are optional available where the laboratory environment requires extensive vibration protection.
Equipment is located in 2580 Engineering.
