Electrical and Computer Engineering
Michigan State University
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Technical Services Counter
Room 3234 Engineering
Monday - Friday
8:00am - 5:00pm
email: eceshop@egr.msu.edu

Research Cleanroom Equipment


Oxford Plus 80 PECVD System

Karl Suss MJB3 Mask Aligner

PlasmaQuest ECR RIE system

Laurel 6" Photoresist Spinner

Kurt Lesker Axiss PVD System

Zeiss Microscope

Nordson March RIE-1701

 


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