Electrical and Computer Engineering
Michigan State University
EGR Home | MSU Home | Contact Us

Primary links

  • General Information
    • Lab Policy
    • Lab Safety
    • Resources
    • Contact Us
  • Orders
    • New Order
    • ECE480 Reports
    • Order Description Search
    • Part Number Search
    • Faculty Order Search
    • Order Processing Tools
  • Testing and Prototyping Tools
    • Connex 3D Printer
    • Optomec Aerosol Jet System
    • MPI TS150 Probe Station
    • Electroplating and Electroless plating
    • CNC Machining
    • Printed Circuit Boards
  • MakerSpace
    • About
    • Hours
  • ECE Research Cleanroom
    • Contact
    • Rules
    • Usage Fees
    • Safety
    • Equipment
    • Schedule
    • Standard Operating Procedurecs
    • Admin
  • Licensed Software
    • Cadence
    • Synopsys
    • Sonnet
    • Ansoft
  • PCB Information
    • Design Rules
    • Layout Programs
    • Tutorials
  • ECE Department Keys
    • Request a Key
    • Adminstrative Tools
  • Staff
    • Equipment
    • Parts Inventory
  • Home

Technical Services Counter
Room 3234 Engineering
Monday - Friday
8:00am - 5:00pm
email: eceshop@egr.msu.edu

Research Cleanroom Equipment


Oxford Plus 80 PECVD System

Karl Suss MJB3 Mask Aligner

PlasmaQuest ECR RIE system

Laurel 6" Photoresist Spinner

Kurt Lesker Axiss PVD System

Zeiss Microscope

Nordson March RIE-1701

 


ECE Shop Links

  • ECE Shop Home

Department Links

  • College of Engineering
  • Applied Engineering Sciences
  • Biosystems & Agricultural Engineering
  • Chemical Engineering & Materials Science
  • Civil & Environmental Engineering
  • Computer Science & Engineering
  • Electrical & Computer Engineering
  • Mechanical Engineering

Help

  • How Tos and FAQs
  • Report Broken Link
  • DECS Help & Support
Web Standards: XHTML 1.0 Strict | CSS | WCAG AA | Developed by DECS
© Michigan State University. All rights reserved