Research Cleanroom Equipment
AXXIS™ Deposition System
AXXIS™ deposition systems facilitate multiple deposition techniques and handle co-deposited films efficiently. Versatile chamber design allows for door- or port-mounted substrate fixtures and service well mounted electron beam source.
Technical information| Deposition Techniques | Magnetron sputtering (RF, DC, or Pulsed-DC),Electron beam evaporation,Thermal evaporation | |
| Process Options | Substrate heating and cooling,Substrate biasing,Ion source for substrate cleaning/assisted deposition,UHV | |
