ERC Clean Room

The Electrical and Computer Engineering clean room is located in room C16 of the Engineering Reseach Center. The clean room is available to university researchers for a basic user fee. The clean room is staffed with a full time technican and is available 24 hrs a day via keyless entry system. Users fees are billed once a month and are based on the amount of usage per researcher. Equipment training is provided for all equipment in the facility. The lab includes facilities for device fabrication and characterization with a range of equipment, such as plasma etch, PECVD, LPCVD, Metallization (sputter, e-gun, thermal evap) wet chemical stations, thermal (oxidation/diffusion) Lithography, and surface analysis tools.

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Equipment	Current Status
Laurell Technologies Spinner	On-Line
Thermco MB-80 Oxidation	On-Line
Thermco MB-80 Drive In	On-Line
Thermco MB-80 Pre Dep	On-Line
Thermco MB-80 Anneal	Off line for a bad controller
Karl Suss MJB-3	On-Line
Zeiss Microscope	On-Line
PlasmaQuest 4532 RIE	System down for vacuum leak
AE 600W RF	On-line
AE 1KW DC	On-line
Kurt Lesker PVD System	On-line
E-Beam Gun	On-Line
Plasmalab 80Plus System	On-Line (HF power only, no LF power)