Die-level photolithography and etchless parylene packaging processes for on-CMOS electrochemical biosensors

Title	Die-level photolithography and etchless parylene packaging processes for on-CMOS electrochemical biosensors
Publication Type	Conference Paper
Year of Publication	2012
Authors	Li, L, Liu, X, Mason, AJ
Conference Name	Circuits and Systems (ISCAS), 2012 IEEE International Symposium on
Publisher	IEEE

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