Skip to main content

Facilities and Equipment

You are here

Fraunhofer CCD offers access to the joint Fraunhofer/University laboratories, which are located on the campus of Michigan State University (East Lansing, Michigan) and an industrial laboratory in Plymouth, Michigan. Facilities related to the pre-treatment, synthesis/evaporation, processing and characterization of diamond materials and thin films include:

Chemical Vapor Deposition Equipment

  • 3x 2.45 GHz microwave plasma assisted chemical vapor deposition machines for diamond synthesis (intrinsic)
  • 1x 2.45 GHz microwave plasma assisted chemical vapor deposition machine for boron-doped (p-type) diamond synthesis
  • 1x 2.45 GHz microwave plasma assisted chemical vapor deposition machine for phosphors-doped (n-type) diamond synthesis
  • 1x 915 MHz microwave plasma assisted chemical vapor deposition machine for diamond synthesis

Physical Vapor Deposition Equipment

  • 3x fully automated industrial coating machines 
  • 1x R&D physical vapor deposition system 
  • DC cathodic vacuum arc sources
  • RF/DC magnetron sputter sources
  • Anode layer ion source
  • Laser-Arc System for deposition of tetrahedrally bonded amorphous carbon (ta-C)

Post-Processing and Micro Fabrication Equipment

  • Diamond lapping and polishing machine
  • Laser for micro machining
  • Cleanroom including PE-CVD, DC/RF sputtering. e-beam evaporation, photo lithography, diffusion furnaces, and plasma etching
  • Electron cyclotron resonance plasma etcher

Characterization

  • Laser induced surface acoustic wave tester to measure Young’s modulus (More Info)
  • Optical and electron microscopes (SEM) including energy dispersive X-ray spectroscopy for chemical analysis (EDX)
  • Wear testing (wear volume and coefficient of friction) dry and lubricated
  • Cyclic voltammetry electrochemical tester
  • Contact angle measurement
  • Calo-Tester
  • Surface profilometry
  • Raman spectroscopy
  • X-ray diffraction (XRD)
  • Photo electron spectroscopy (XPS)
  • FTIR spectroscopy
  • UV-Vis spectroscopy
  • Atomic force microscopy (AFM)