Design of NanoRobotic Manipulators

1999-2005

Actuation: Static Extension, Stick-slip Motion, Position Feedback

Vision Systems: Optical Microscopes (OM), Scanning Electron Microscopes (SEM), Transmission Electron microscopes (TEM), Scanning Tunneling Microscopes (STM), Atomic Force Microscopes (AFM)

Environment Compatibility: Air, Liquid, Vacuum

Scaling: Surface/intermolecular Forces

Sample stages: Active, Passive, Rotary

Applications: Manipulation, Instrumentation, Fabrication, Assembly

Comparison of nanomanipulators

Microscopes, environments, and strategies of nanomanipulation

[JP22]

T. Fukuda, F. Arai, and L. X. Dong, Assembly of Nanodevices with Carbon Nanotubes through Nanorobotic Manipulations, Proceedings of the IEEE, Vol. 91, No. 11, pp. 1803-1818, Nov. 2003. (Invited review)

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[Th02]

L. X. Dong, Nanorobotic Manipulations of Carbon Nanotubes, Ph.D. Thesis, Nagoya University, Nagoya, Japan, March 2003.

Hybrid NanoRobotic Manipulator

2004-2005

SEM Manipulators: 3 Units, 8-DOF fine/coarse motion actuated by Picomotors and Nanomotors

TEM Manipulators: 3-DOF fine motion actuated by PZTs

Actuation: Static Extension, Stick-slip Motion

Vision Systems: SEM (JEOL, JSM6500F), TEM (Hitachi, H-800, 200kV)

Environment Compatibility: Vacuum

Sample stages: Passive (TEM)

Processes: Manipulation of deformable TEM sample stage inside SEM

Objects: Deformable TEM sample stage, MWNTs

[JP27]

M. Nakajima, F. Arai, L. X. Dong, H. Matsuura, and T. Fukuda, Measurement of a Bending Modulus of a Nanotube through Hybrid Nanorobotic Manipulation System inside SEM and TEM (in Japanese), Transactions of the Japan Society of Mechanical Engineers, Part C, Vol. 71, No. 704, pp. 1349-1354, April 2005.

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[IC39]

M. Nakajima, F. Arai, L. X. Dong, and T. Fukuda, A Hybrid Nanorobotic Manipulation System Integrated with Nanorobotic Manipulators inside Scanning and Transmission Electron Microscopes, Proc. of 2004 4th IEEE Conf. on Nanotechnology (IEEE-NANO2004), pp. 462-464, Munich, Germany, Aug.17-19, 2004.

Nano Laboratory

2003-2005

Fabrication (EBID, destructive fabrication, shape modification...)

Instrumentation (Electromechanical property characterization...)

Manipulation (3D, free space, structure correlation...)

[JP22]

T. Fukuda, F. Arai, and L. X. Dong, Assembly of Nanodevices with Carbon Nanotubes through Nanorobotic Manipulations, Proceedings of the IEEE, Vol. 91, No. 11, pp. 1803-1818, Nov. 2003. (Invited review)

[HTML] [PDF]

[IC29]

L. X. Dong, F. Arai, M. Nakajima, P. Liu, and T. Fukuda, Nanotube Devices Fabricated in a Nano Laboratory, Proc. of 2003 IEEE Int. Conf. on Robotics and Automation (ICRA2003), pp. 3624-3629, Taipei, Taiwan, Sept. 14-19, 2003.

NanoRobotic Manipulator-III

2002-2004

Manipulator: 4 Units, 10-DOF fine/coarse motion actuated by Picomotors and Nanomotors, 6-DOF fine motion actuated by PZTs

Actuation: Static Extension, Stick-slip

Vision Systems: SEM (JSM6500F)

Environment Compatibility: Vacuum

Sample stages: Active, Rotary

Processes: Pick and place, Bending, Buckling, Shape Modification, Shell Engineering, Assembly (VDW, Mechanochemistry)

Objects: MWNTs

[JP25]

L. X. Dong, F. Arai, and T. Fukuda, Destructive Constructions of Nanostructures with Carbon Nanotubes through Nanorobotic Manipulation, IEEE/ASME Transactions on Mechatronics, Vol. 9, No. 2, pp. 350-357, June 2004.

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[IC21]

L. X. Dong, F. Arai, and T. Fukuda, Shape Modification of Carbon Nanotubes and Its Applications in Nanotube Scissors, Proc. of 2002 2nd IEEE Conf. on Nanotechnology (IEEE-NANO2002), pp. 443-446, Washington, DC, U.S.A., Aug. 26-28, 2002.

NanoRobotic Manipulator-II

2000-2002

Manipulator: 3 Units, 4-DOF fine/coarse motion actuated by Picomotors, 6-DOF fine motion actuated by PZTs

Actuation: Static Extension, Stick-slip

Vision Systems: OM, SEM (JSM5300, JSM6500F)

Environment Compatibility: Vacuum

Sample stages: Active, Rotary

Processes: Pick and place, Bending, Buckling, Assembly (EBID)

Objects: MWNTs

[JP18]

L. X. Dong, F. Arai, and T. Fukuda, Three-dimensional Nanorobotic Manipulations of Carbon Nanotubes, Journal of Robotics and Mechatronics, Vol. 14, No. 3, pp. 245-252, 2002.

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[IC14]

L. X. Dong, F. Arai, and T. Fukuda, 3D Nanorobotic Manipulation of Nano-order Objects inside SEM, Proc. of 2000 Int. Symp. on Micromechatronics and Human Science (MHS2000), pp. 151-156, Nagoya, Japan, Oct. 22-25, 2000.

NanoRobotic Manipulator-I

1999-2001

Manipulator: 2 Units, 4-DOF fine/coarse motion actuated by Picomotors

Actuation: Static Extension, Stick-slip

Vision Systems: OM, SEM (JSM5300)

Environment Compatibility: Air, Vacuum

Sample stages: Active, Rotary

Processes: Pick and place, Bending

Objects: 1 mm polystyrene beads, MWNTs

[JP17]

L. X. Dong, F. Arai, and T. Fukuda, 3-D Nanorobotic Manipulation of Nanometer-scale Objects, Journal of Robotics and Mechatronics, Vol. 13, No. 2, pp. 146-153, 2001.

XYZ Stage

1999-2000

Manipulator: 3-DOF fine motion actuated by PZT, 3-DOF coarse motion actuated manually

Actuation: Static Extension

Vision Systems: OM

Environment Compatibility: Air

Sample stages: Active

Processes: Pick and place

Objects: 3 mm polystyrene beads

[M00-1]

F. Arai, T. Noda, T. Fukuda, and L. X. Dong, Basic Experiment on the 3 Dimensional Nano-Manipulation (in Japanese), Proc. of JSME Conf. on Robotics and Mechatronics (Robomec2000), pp. 2A1-62-080, Kumamoto, Japan, May 12-13, 2000.

Participants

99-05

Lixin Dong (Michigan State University)

99-05

Fumihito Arai (Nagoya University)

99-05

Toshio Fukuda (Nagoya University)

99-00

T. Noda (Nagoya University)

04-05

M. Nakajima (Nagoya University)

Founding Sources

99-00

Nagoya University

00-02

Fundamental Research B, Monbusho, Japan

03-06

Fundamental Research B, Monbusho, Japan