ECE870
Lego Combdrive Demo
This course, on Micro Electro Mechanical Systems (MEMS) or Microsystems, deals with (a) fundamentals of micro- and nano-fabrication, sensors and actuators, capacitive MEMS, (b) BioMEMS and RFMEMS, (c) system integration.
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Office hours:
M:
3:00 – 4:00 p.m.
W:
4:15 – 5:00 p.m.
Instructor E-mail: aslam@msu.edu
Class Meets:
M, W
6:00 - 7:15 P.M.
2320 EB
NON-CREDIT
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ECE871
Microsystems Fbrication:
Design, Simulation, Fabrication and Testing of MEMS and Signal Processing ICs.
ECE480
NON-CREDIT
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ROBOTICS & NANO-TECHNOLOGY
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WORKSHOPS
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OTHERS
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