Electrical and Computer Engineering
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ECE Technical Services
C138 ERC Bldg
Rm. 3234 Engineering
Monday - Friday
8:00am - 5:00pm
email: eceshop@egr.msu.edu

ECE Cleanroom Equipment

Equipment Administrative Tools


Oxford Plus 80 PECVD System

Karl Suss MJB3 Mask Aligner

PlasmaQuest ECR RIE system

Laurel 6" Photoresist Spinner

Kurt Lesker Axiss PVD System

Zeiss Microscope

 


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