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Micro and Nano Engineering Facility (MNEF)
ERC Cleanroom

To help minimize the costs for the use of this facility, we involve the cleanroom users in the operation and maintenance of the cleanroom. For example, we hold regular cleanroom "cleaning parties" when the users are involved in cleaning the overall cleanroom.  Specific users are also asked to assist with the training on and regular maintenance of individual instruments in the cleanroom (see the contacts site). 

ERC Cleanroom rates are as follows:

- Yearly fee per student/researcher of $2,500.00 to include gowns (billed monthly, after each month of use).

- Monthly fee per student/researcher of $250.00 will not include the necessary gowns. A one time activation fee at the beginning of access of $250.00 will be billed to cover access and gown cost.
- For the monthly fee option, heavy usage would be defined as a number of days accessed in one month of 12 days or more and billed at the $250.00 rate. Light usage would be defined as less than 12 days of usage, and billed at a rate of $125.00.

Industrial users of the cleanroom will receive training for the individual systems of interest and are subject to user fees for the individual processes needed as based on MEMS Exchange rates for those processes.  If you are interested, please contact Brian Wright for details.

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