System	System Administrator(s)	Faculty Contact(s)
Plasma Quest ECR RIE etching system	Xiangwei Zhu, Romy Liske	Dr. Aslam and Dr. Reinhard
Gaertner model 115B ellipsometer	Chun-I Wu	Dr. Reinhard
Zeiss differential interference contrast microscope	Stanley Shengxi Zuo	Dr. Reinhard
Suss MJB3 submicron mask aligner	Nelson Sepulveda-Alancastro, Romy Liske	Dr. Aslam and Dr. Hogan
Diffusion furnaces	Romy Liske, Arjun Jayaraman	Dr. Aslam and Dr. Schulke
Wet station	Yuxing Tang, Chun-I Wu	Dr. Hogan and Dr. Grotjohn
Spinner and resist ovens	Arjun Jayaraman, Nelson Sepulveda-Alancastro, Romy Liske	Dr. Hogan and Dr. Grotjohn
Chemicals	Chun-I Wu, Yang Lu	Dr. Hogan and Dr. Mason
Gowning Supplies & Cleaning	Yang Lu, Nelson Sepulveda-Alancastro, Jonathan D'Angelo	Dr. Hogan
AXXIS System (E-beam and Sputtering system)	Jonathan D'Angelo, Xiangwei Zhu, Nicholas Meyer	Dr. Hogan
PECVD system	Xiangwei Zhu	Dr. Hogan