Nelson Receives NSF Grant

Nelson Receives NSF Grant
for the development of smart MEMS actuators

This work presents a comprehensive research plan that will enable a new thermal transducer technology through the drastic stress changes which occur in microstructures coated with VO2 thin films during this material’s structural phase-change. The devices to be developed are monolithically integrated smart MEMS actuators and consist of: 1) fully electrically actuated programmable micro-actuators, and 2) the biomimetic implementation of a micrometer-sized fin. The award is for $360,001 for three years. (http://nsf.gov/awardsearch/showAward?AWD_ID=1306311&HistoricalAwards=false).