AURIGA® - CrossBeam Workstation
Dual Column SEM-FIB
The CMSC has recently acquired a dual column Focused Ion Beam (FIB) – Secondary Electron Microscope (SEM). This state of the art instrument adds a gallium focused ion beam to a high resolution SEM. The ion beam is of sufficient energy to remove material from the sample. This allows the operator to examine subsurface structures, sample porosity, grain orientation, layered materials, cell structures and membranes, and many other features. In addition, the ion beam can be manipulated into milling complex shapes for circuit design, micromachining, microfluidics, and micron scale materials testing.
The FIB-SEM at the CMSC has several features including:
For performance specifications, go to http://www.smt.zeiss.com/auriga
Please contact Dr. Per Askeland to explore how the Auriga Dual Column Focused Ion Beam SEM can be applied to resolve your material and engineering issues.