Carl Zeiss Varible Pressure SEM EVO LS25

Carl Zeiss EVO LS 25
 Variable Pressure Scanning Electron Microscope
Recently, the CMSC acquired a variable pressure scanning electron microscope (VP-SEM), a Zeiss EVO LS 25. The VP-SEM is able to operate under high vacuum conditions like a typical SEM, but also has the capability of operating under elevated pressures (10-400 Pa). The advantage of operating at elevated pressures is that the sample requirements that can normally hinder traditional SEM use (insulating and/or out-gassing specimens) are lifted and a wide variety of specimens can be examined. The microscope operates in three pressure modes: High Vacuum for traditional SEM operations; Variable Pressure, where 10-80 Pa of nitrogen acts to neutralize surface charging; and Extended Pressure, where 80-400 Pa of water is introduced for hydrated specimens.
Features of the VP-SEM include:
1.     A five quadrant back scatter detector.
2.     A Peltier cooling stage for precise control of humidity above the sample.
3.     A heating stage capable of reaching 1200 C.
4.     A large specimen chamber that is able to accommodate specimens up to 22 cm in diameter.
5.     Energy Dispersive X-ray Detector of determining atomic compositions.
 
For performance specifications, go to http://www.zeiss.com/C1256E4600305472?Opendatabase
 
Please contact Dr. Per Askeland to schedule an appointment to see how the Variable Pressure SEM can be applied to your research or manufacturing needs. 
Tel: 517.432.5245