Project title: (Capacitor-based MEMS microphone)
(Yunfei
Xu)
Abstract
In recent years, due to the growing request for high quality microphones in
various applications, the development of MEMS microphone received a great deal
of attention. The MEMES microphone is commonly composed of a mobile membrane,
suspended over a fixed backplate. The membrane and the backplate construct a
variable capacitor whose capacitance changes when an acoustic wave comes and
hits the mobile membrane. In this project, we will first establish a 1D model
for MEMS microphone. Then, we will design a regulator that can control the
position of the air gap and recover the information of acoustic force at the
same time. Since not all the state variables of the system are available, we need
to design an output feedback controller instead of state feedback controller. A
high-gain observer will be used for this purpose.
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