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Facilities
The following equipment is available in the 500 sq. ft. laboratory
dedicated to AMSaC research group.
Microelectronics Testing and
Inspection
Karl Suss PM5 Submicron
probe station with bond pad probe card and probe manipulators
Agilent 4395A
Spectrum/Network analyzer
Omni-101 Microprocessor
Controlled Potentiostat (with cyclic voltammetry)
HP 4145B Semiconductor
parameter analyzer
Agilent 54622D and 54624A
Mixed-signal oscilloscopes and logic analyzer
KEITHLEY 6487
Picoammeter/Voltage Source
Various power supplies,
digital multimeters, function generators, etc. with GPIB interfaces
Bryant AH-202XS Low/High
Temperature, Humidity Test Chamber
Kulicke & Soffa 4524D
Manual ball bonder
Nikon SMZ800 Macro-zoom
scope with Nikon Coolpix 950 digital camera
Texas Instruments MSP430
evaluation boards for MSP430F12x/14x microcontoller
Digilab XLA3 Xilinx FPGA
development board and ISE development software
Computers
3 Sun Ultra 10
workstations running Cadence software for IC/MEMS design and simulation
4 desktop and 2 laptop PCs for software development, user
interface to data acquisition instruments, and document preparation
Software Resources
Mixed signal VLSI design
tools from Cadence Design Systems, Inc.
LabVIEW
Matlab with Simulink
Various documentation
software including Word, Excel, CorelDRAW, and Photoshop.
(These software tools are maintained by the Department
of Computing Services)
The following resources are shared by the Electrical and Computer
Engineering department faculty and are available to the AMSaC research group.
ECE Micro and Nano Engineering
Facility
Test and Inspection Equipment
HP 4145B Semiconductor
parameter analyzer
HP Impedance analyzer,
low frequency
HP Impedance analyzer,
high frequency
Cryogenic probe station
Cleanroom Facilities
Suss MJB3 submicron mask
aligner
Thermal evaporator system
(cryogenically pumped
Gaertner model 115B
elipsometer
Zeiss differential
interference contrast microscope
AET rapid thermal
processor
Diffusion furnances
Resist and cleaning
equipment
Wafer probing and test
equipment
Plasma Quest ECR etching
system
AXXIS Physical Vapor
Deposition System (sputtering and e-beam)
Micromachining lab bench
for bulk etching of silicon using KOH
ECE Shop
Test and Inspection Equipment
General support and
maintenance of lab facilities
Printed circuit board
fabrication
Computer network
management
Keck Microfabrication Facility
class 100 cleanroom for
photoresist preparation and photolithography
three bays for scanning
electron microscopy and electron beam lithography
thin film preparations
and characterization
Physics Department Machine Shop
These facilities and services are provided by Michigan State
University and are
available to the AMSaC research group.
The AMSaC
research group also benefits from involvement in the NSF Center for Wireless
Integrated Microsystems with access to the substantial facilities of
collaborators at The University of Michigan and the Michigan Technological
Institute.
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