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Facilities
The following equipment is available in the 500 sq. ft.
laboratory dedicated to AMSaC research group.
Microelectronics Testing and Inspection
Karl Suss PM5
Submicron probe station with bond pad probe card and probe manipulators
Agilent 4395A
Spectrum/Network analyzer
Omni-101
Microprocessor Controlled Potentiostat (with cyclic voltammetry)
HP 4145B
Semiconductor parameter analyzer
Agilent 54622D
and 54624A Mixed-signal oscilloscopes and logic analyzer
KEITHLEY 6487
Picoammeter/Voltage Source
Various power
supplies, digital multimeters, function generators, etc. with GPIB interfaces
Bryant AH-202XS
Low/High Temperature, Humidity Test Chamber
Kulicke &
Soffa 4524D Manual ball bonder
Nikon SMZ800
Macro-zoom scope with Nikon Coolpix 950 digital camera
Texas
Instruments MSP430 evaluation boards for MSP430F12x/14x microcontoller
Digilab XLA3
Xilinx FPGA development board and ISE development software
Computers
3 Sun Ultra 10
workstations running Cadence software for IC/MEMS design and simulation
4 desktop and 2
laptop PCs for software development, user interface to data acquisition
instruments, and document preparation
Software Resources
Mixed signal
VLSI design tools from Cadence Design Systems, Inc.
LabVIEW
Matlab with
Simulink
Various
documentation software including Word, Excel, CorelDRAW, and Photoshop.
(These software tools are maintained
by the Department of Computing Services)
The following resources are shared by the Electrical and
Computer Engineering department faculty and are available to the AMSaC
research group.
ECE Micro and Nano Engineering Facility
Test and Inspection Equipment
HP 4145B
Semiconductor parameter analyzer
HP Impedance
analyzer, low frequency
HP Impedance
analyzer, high frequency
Cryogenic probe
station
Cleanroom Facilities
Suss MJB3
submicron mask aligner
Thermal
evaporator system (cryogenically pumped
Gaertner model
115B elipsometer
Zeiss
differential interference contrast microscope
AET rapid
thermal processor
Diffusion
furnances
Resist and
cleaning equipment
Wafer probing
and test equipment
Plasma Quest
ECR etching system
AXXIS Physical
Vapor Deposition System (sputtering and e-beam)
Micromachining
lab bench for bulk etching of silicon using KOH
ECE Shop
Test and Inspection Equipment
General support
and maintenance of lab facilities
Printed circuit
board fabrication
Computer
network management
Keck Microfabrication Facility
class 100
cleanroom for photoresist preparation and photolithography
three bays for
scanning electron microscopy and electron beam lithography
thin film
preparations and characterization
Physics Department Machine Shop
These facilities and services are provided by Michigan State University
and are available to the AMSaC research group.
The
AMSaC research group also benefits from involvement in the NSF Center
for Wireless Integrated Microsystems with access to the substantial
facilities of collaborators at The University of Michigan and the Michigan
Technological Institute.
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