Microwave Plasma and
Microwave Heating Research
Modeling
Microwave
plasma sources
Microwave
plasma sources for microsystems
Plasma
characterization and diagnostics
CVD
Diamond technology
Microwave
material processing machines
Electronic
and Optical Materials and Devices Research
Sensors
and MEMS
Materials
characterization
Microwave
processing of materials
CVD
Diamond technology
Microsystems and Micromanipulation
Research
Systems
and controls