Micro and Nano Engineering Center


At Michigan State University


POLY-DIAMOND SENSORS

Poly-diamond microsensors are expected to outperform their Si counterparts in sensitivity, especially in harsh environments and at high temperatures. Researchers from Michigan State University developed an IC-compatible diamond film technology (ICDT), and they were the first to (i) measure THE piezoresistive gauge factor (GF) and (ii) report a GF above 4000 in poly-diamond. 
 


 
 

POLY-DIAMOND MEMS

Due to diamond?s low friction coefficient, high thermal conductivity, chemical and mechanical stability, and large band gap, diamond MEMS are expected to outperform their Si counterparts. Using an IC-compatible poly-diamond technology, MSU researchers have designed and fabricated poly-diamond MEMS structures for the first time. 


 


 
 

References

MNEC Publications Related to Poly-Diamond Sensors and MEMS include:

  1. S. Sahli and D.M. Aslam, ?Ultra-high Sensitivity Intra-Grain Poly-Diamond Piezoresistors", Sensors and Actuators: A, vol. 71/3, 193-197(1998).
  2. S. Sahli and D.M. Aslam, ?Piezoresistive Pressure Microsensors Using P-Type Polycrystalline Diamond Films?, Sensors and Actuators: A, vol. 69/1, 27-32(1998).
  3. G. Yang and D.M. Aslam, ?Single-Structure Heater and Temperature Sensor Using a p-Type Polycrsytalline Diamond Resistor?, IEEE Electron Dev. Lett. 17(5), 250-252 (1996). 
  4. G.S. Yang, M. Aslam, K.P. Kuo, D.K. Reinhard and J. Asmussen, ?Effect of Ultra-High Nucleation Density on Diamond Growth at Different Growth Rates and Temperatures", J. Vac. Sci. Technol. B,  vol. 13, 1030(1995). 
  5. S.Yang and M. Aslam, "Ultra-High Nucleation for Growth Smooth Diamond Films", Appl. Phys. Lett., 66 (3), 311(1995).
  6. M. Aslam, G.S. Yang and A. Masood,  ?Boron-Doped Vapor-Deposited Diamond Temperature Microsensors?, Sensors and Actuators A, vol. 45 (2), pp. 131-138, 1994.
  7. I. Taher, M. Aslam, M. Tamor, "Piezoresistive Microsensors using p-type CVD Diamond Films", Sensors and Actuators A, vol. 45 (1), 35-43, 1994. 
  8. M. Aslam and D. Schulz, "Technology of Diamond Microelectromechanical Systems", Technical Digest: 8th Int. Conf. Solid-State Sensor & Actu., Stockholm (Sweden), Vol. 2, 222-224 (1995).