Micro and Nano Engineering Center


At Michigan State University


Materials Characterization

MNEC does multiple film characterization which produce new results, both fundamental and practical.

Tapping mode atomic force microscope work with X-ray diffraction work have identified a mechanism by which the very small amounts of nitrogen can act catalytically to both dissolve defective crystallites and enhance the grow of larger more perfect crystallites.

The electrical properties of the nitrogen grown series have been analyzed DC through 1 MHz, and an unexpected peak in the dc resistivity has been found. A corresponding increase in the resistivity of the grain boundaries has been observed directly for the first time using scanning tunneling spectroscopy.

One of the major question about films processed into components for MEMS devices is the amount of stress introduced by the processing. We are quantitatively investigating stress questions for laser processed diamond films for MEMS applications by a combination of x-ray residual stress analysis for large area analysis and polarized Raman for close-up.

Electronic Structure of Diamond and Related Materials

We are performing integrated materials and electronic properties investigations of charge transport in polycrystalline diamond films, analyzing the effects of the morphological differences, nitrogen effects, and thermal annealing effects on the total conduction within the films. The investigations are proceeding using a Macroscopic/Microscopic approach. Macroscopic analysis of the films? conductance, resistance, susceptance and reactance is performed using Impedance Spectroscopy (IS). The results are analyzed in light of a theoretical model which incorporates bulk, hopping and and grain boundary electrical conduction mechanisms, . modeled using a four path physical model which include dc resistance, geometric capacitance, hopping and grain boundaries. We couple our Macroscopic analysis to a Microscopic analysis of local morphologies and electronic properties, using Scanning Tunneling Microscopy and Spectroscopy. We are particularly investigating the local electronic structure of the various morphologies at the surfaces, and the variations in these introduced by nitrogen, or by nitrogen plus thermal annealing. These are atomic level investigations. Scanning Tunneling Microscopy (STM) is the preferred tool for truly atomic scale resolution of surface morphology. Scanning Tunneling Spectroscopy (STS) is used to compare the local electronic structures generated by the local atomic lattice structures through analysis of atomic scale tunneling current-bias voltage curves.
 
 Investigations in progress:

  • Macroscopic/Microscopic Investigation of Charge Injection and Thermal Stability
  • Macroscopic/Microscopic investigation of electronic properties of N2-CH4-H2 diamond thin films