ERC Cleanroom Contacts

System System Administrator(s) Faculty Contact(s)
Plasma Quest ECR RIE etching system Xiangwei Zhu, Romy Liske Dr. Aslam and Dr. Reinhard
Gaertner model 115B ellipsometer Chun-I Wu Dr. Reinhard
Zeiss differential interference contrast microscope Stanley Shengxi Zuo Dr. Reinhard
Suss MJB3 submicron mask aligner Nelson Sepulveda-Alancastro, Romy Liske Dr. Aslam and Dr. Hogan
Diffusion furnaces Romy Liske, Arjun Jayaraman Dr. Aslam and Dr. Schulke
Wet station Yuxing Tang, Chun-I Wu Dr. Hogan and Dr. Grotjohn
Spinner and resist ovens Arjun Jayaraman, Nelson Sepulveda-Alancastro, Romy Liske Dr. Hogan and Dr. Grotjohn
Chemicals Chun-I Wu, Yang Lu Dr. Hogan and Dr. Mason
Gowning Supplies & Cleaning Yang Lu, Nelson Sepulveda-Alancastro, Jonathan D'Angelo Dr. Hogan
AXXIS System (E-beam and Sputtering system) Jonathan D'Angelo, Xiangwei Zhu, Nicholas Meyer Dr. Hogan
PECVD system Xiangwei Zhu Dr. Hogan

System Administrator Duties