ERC Cleanroom Contacts
| System | System Administrator(s) | Faculty Contact(s) |
| Plasma Quest ECR RIE etching system | Xiangwei Zhu, Romy Liske | Dr. Aslam and Dr. Reinhard |
| Gaertner model 115B ellipsometer | Chun-I Wu | Dr. Reinhard |
| Zeiss differential interference contrast microscope | Stanley Shengxi Zuo | Dr. Reinhard |
| Suss MJB3 submicron mask aligner | Nelson Sepulveda-Alancastro, Romy Liske | Dr. Aslam and Dr. Hogan |
| Diffusion furnaces | Romy Liske, Arjun Jayaraman | Dr. Aslam and Dr. Schulke |
| Wet station | Yuxing Tang, Chun-I Wu | Dr. Hogan and Dr. Grotjohn |
| Spinner and resist ovens | Arjun Jayaraman, Nelson Sepulveda-Alancastro, Romy Liske | Dr. Hogan and Dr. Grotjohn |
| Chemicals | Chun-I Wu, Yang Lu | Dr. Hogan and Dr. Mason |
| Gowning Supplies & Cleaning | Yang Lu, Nelson Sepulveda-Alancastro, Jonathan D'Angelo | Dr. Hogan |
| AXXIS System (E-beam and Sputtering system) | Jonathan D'Angelo, Xiangwei Zhu, Nicholas Meyer | Dr. Hogan |
| PECVD system | Xiangwei Zhu | Dr. Hogan |