Micro and Nano Engineering Facility (MNEF)

DER Cleanroom

Click on the instrument of interest to view the Standard Operating Procedure (SOP) for that instrument.

• Suss MJB3 submicron mask aligner

• Gaertner model 115B elipsometer

• Zeiss differential interference contrast microscope

• Diffusion furnances

• Photoresist spinner

• Wafer probing and test equipment (room C18)

• PlasmaQuest reactive ion etching (RIE) system

• Chemical etching wet station

• AXXIS Physical Vapor Deposition System (sputtering and e-beam)