ERC Cleanroom Rules
- All Cleanroom users are
required to pass the “ORCBS Chemical Hygiene and Laboratory Safety” course
which includes the hazardous waste training.
- Check your clothing. Everyone
must wear full-length pants when using the lab. You may put on a pair of
pants over shorts. Do not enter the cleanroom with bare legs exposed. Do
not enter wearing sandals or open-toed shoes. Wear shoes made of
leather that completely cover the foot. Do not wear dirty shoes. It is
recommended that you purchase a dedicated pair of shoes for the cleanroom.
- Hair nets, booties, frocks
(cleanroom compatible lab coats), and gloves must be worn at all times. NO EXCEPTIONS!
- Goggles or face shield must
be used at all times when working in the hoods. This applies even if no chemicals
are being used. Others might have chemicals in the hood, or residual
chemicals may exist which could cause harm.
- No makeup shall be worn
inside the cleanroom.
- No samples, beakers, or
notebooks are to be left in the room/hoods unattended w/o being labeled.
You must label them with your name, the date, their contents and when you
will return for them. Items left unattended/unlabeled will be disposed of
immediately.
- Food and drinks are prohibited
in the cleanroom. Chewing gum is not allowed in the cleanroom.
- Smoking is not allowed 30
minutes before entering the cleanroom.
- Avoid wearing contacts.
Contacts can absorb vapors or trap chemicals in the space between the lens
and the eye. In an emergency eye muscles may spasm, preventing removal of
the contact lens. Contacts may thus interfere with flushing the eye with
water and allow the eyes long and intimate contact with toxic chemicals. If you remove your contacts, do not bring
them into the lab. Leave your
contacts in a safe place outside of the lab and away from any potentially
harmful chemicals.
- Only use one piece ball point
pens (no clickable pens) and cleanroom paper. Lead pencils are not allowed
in the cleanroom.
- You must go through training
for each of the systems used in the cleanroom by contacting an individual
on the Microstructures Fabrication
Cleanroom Contacts list, including:
a)
the wet station
b)
the photoresist spinner
c)
the mask aligner
d)
the AXXIS (PVD) deposition system
e)
the reactive ion etch (RIE) system
f)
the diffusion furnaces
Your name must be sent to Dr. Hogan
by a system administrator of the piece of equipment you wish to use for you to
operate ANY piece of equipment in the CLEANROOM.
- Scheduling/signup lists for the various systems (PVD,
Mask Aligner, RIE PlasmaQuest, etc.) within the cleanroom are to be
maintained by the system administrators.
- All cleanroom equipment usage must be entered in the
respective log manual. Your entry
into the logbook must include: Your name, the date, your advisor’s name,
the time you began, the time you finished, your signature, comments on the
operation of the equipment (including any difficulties you experienced
before, during, or after you finished using the equipment), and the
chemical and/or gas usage.
- Nonessential items of
equipment (tools, books, etc.) will not be allowed to accumulate and will
be removed from the lab.
- Try not to sneeze or cough in
the cleanroom. Don't breathe directly on a clean surface or wafer.
Singing, whistling, and chewing gum also produce severe contamination. Do
not let your skin touch any surface in the cleanroom. A common mistake is
to touch your face and then a lab surface. Your skin will leave behind oils
on your gloves. If you need to itch your face (or any skin), use a clean
wipe so you do not touch your skin with your gloves.
- Always clean up your work
area before you leave. Thoroughly rinse the beakers you used with DI water
and then store upside-down in their appropriate locations.
First violations of these rules will be reported to the
user’s advisor. Subsequent violations
could result in expulsion from the cleanroom.
If you are unsure about any procedure, or condition in the
cleanroom, contact the system administrator for that piece of equipment, Dr.
Hogan, and/or ORCBS.